Materion‘s patent involves an apparatus with an ultraviolet laser and reflective mirrors made from beryllium, aluminum metal matrix, or silicon carbide. The mirrors reflect the laser beam for use in annealing silicon films for electronic displays or in a laser lift-off process. GlobalData’s report on Materion gives a 360-degree view of the company including its patenting strategy. Buy the report here.

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According to GlobalData’s company profile on Materion, Ceramic composite laminates was a key innovation area identified from patents. Materion's grant share as of January 2024 was 57%. Grant share is based on the ratio of number of grants to total number of patents.

Ultraviolet laser apparatus with reflective mirror for silicon film processing

Source: United States Patent and Trademark Office (USPTO). Credit: Materion Corp

The granted patent (Publication Number: US11885990B2) discloses an apparatus comprising an ultraviolet laser and at least one reflective mirror made from silicon carbide or an aluminum metal matrix composite. The mirror substrate is designed with specific optical Figure of Merit (FoM) values to ensure optimal performance, including resonant frequency, self-weight deflection, steady-state thermal distortion coefficient, and transient thermal distortion coefficient. The use of reinforcing particles, such as silicon carbide, in the aluminum metal matrix composite enhances the structural integrity of the mirror substrate.

Furthermore, the patent describes a method of making an electronic part using the ultraviolet laser apparatus with the reflective mirror. By reflecting the laser beam towards a precursor film, the method enables the production of electronic parts, particularly amorphous films that can be crystallized. The electronic parts manufactured using this method find applications in organic light-emitting diode (OLED) displays or low-temperature polycrystalline silicon liquid crystal displays (LTPS LCD). Additionally, an ultraviolet reflective mirror with a specific optical FoM and a reflective coating is detailed in the patent, showcasing the innovative design features for improved performance and durability in various applications.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.